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Improving the lubrication of silicon surfaces using ionic liquids as oil additives: the effect of sulfur-based functional groups
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Advisor(s)
Abstract(s)
The performance of micro/nanoelectromechanical systems (MEMS/NEMS) relies on efficient lubrication. In the present work, new sulfur-based organic salts were tested as additives in a polyethylene glycol to lubricate silicon surfaces used in the manufacture of MEMS/NEMS. Seven salts were tested: 1-butylsulfonic-3-methylimidazolium triflate [(C4SO3H)MIM][TfO], thiamine triflate [Thiamine][TfO]2, 1-ethyl-3-methylimidazolium camphorsulfonate [C2MIM][CSA] [isomers (R) and (S)], 1,3-dimethylpiridinium methylsulfate [C1-3pic][MeSO4], methylimidazolium methanesulfonate [HMIM][MeSO3], and tetramethylguanidine methanesulfonate [TMG][MeSO3]. A nanotribometer was used to determine the friction coefficients using steel spheres as counter bodies. Excellent tribological properties were achieved with the additives containing the anions [MeSO4]− and [MeSO3]−. The films formed on the Si substrates were studied by FTIR, ellipsometry and AFM. A mixed lubrication mechanism was proposed where additive adsorption avoids contact between sliding surfaces.
Description
Keywords
Ionic liquids Additives Silicon Friction coefficient
Citation
Antunes, M., Donato, M.T., Paz, V. et al. Improving the Lubrication of Silicon Surfaces Using Ionic Liquids as Oil Additives: The Effect of Sulfur-Based Functional Groups. Tribol Lett 68, 70 (2020). https://doi.org/10.1007/s11249-020-01308-7
Publisher
Springer Nature