Antunes, MónicaDonato, Mariana T.Paz, VictóriaCaetano, Fernando J. P.Santos, LuísColaco, RogérioBranco, Luís C.Saramago, Benilde2022-01-202022-01-202020-05-14Antunes, M., Donato, M.T., Paz, V. et al. Improving the Lubrication of Silicon Surfaces Using Ionic Liquids as Oil Additives: The Effect of Sulfur-Based Functional Groups. Tribol Lett 68, 70 (2020). https://doi.org/10.1007/s11249-020-01308-7http://hdl.handle.net/10400.2/11658The performance of micro/nanoelectromechanical systems (MEMS/NEMS) relies on efficient lubrication. In the present work, new sulfur-based organic salts were tested as additives in a polyethylene glycol to lubricate silicon surfaces used in the manufacture of MEMS/NEMS. Seven salts were tested: 1-butylsulfonic-3-methylimidazolium triflate [(C4SO3H)MIM][TfO], thiamine triflate [Thiamine][TfO]2, 1-ethyl-3-methylimidazolium camphorsulfonate [C2MIM][CSA] [isomers (R) and (S)], 1,3-dimethylpiridinium methylsulfate [C1-3pic][MeSO4], methylimidazolium methanesulfonate [HMIM][MeSO3], and tetramethylguanidine methanesulfonate [TMG][MeSO3]. A nanotribometer was used to determine the friction coefficients using steel spheres as counter bodies. Excellent tribological properties were achieved with the additives containing the anions [MeSO4]− and [MeSO3]−. The films formed on the Si substrates were studied by FTIR, ellipsometry and AFM. A mixed lubrication mechanism was proposed where additive adsorption avoids contact between sliding surfaces.engIonic liquidsAdditivesSiliconFriction coefficientjournal article10.1007/s11249-020-01308-7